MEMS Flow sensor in hydrogen fuel cell

The S400 Air flow sensor series (0-500SLPM flow range) is fabricated using a micro-electromechanical system (MEMS) flow sensor chip. It is suitable for the measurement of clean and relatively dry gases for various purposes. It realizes the digitization, intelligence and high safety of the equipment, and has the innovation of traditional industries.

High sensitivity, high reliability, high stability and low cost characteristics can promote the industry to develop energy-saving and intelligent.

Application

 Ventilator

 oxygen machine

 Gas mask and respirator

 Sprayer

 Continuous positive airway pressure (CPAP) device

 Anesthesia delivery

 Fuel cell control

 spectrometer

 Mass flow controller

 Environmental climate control

 Leak detection

 hydrogen fuel cell system

Feature

 Wide flow range 0-500SLPM 

 High precision (1.5% F.S accuracy) 

 Linear output and temperature compensation 

 Maintain long-term stability with minimal zero drift 

 Solid-state sensing core (no surface void or fragile membrane), anti-blocking and pressure shock 

 Analog output (1 to 5 V) (I2C output is also available) 

 Fast response time (20ms response time)

1. Customizable range between 10SLM and 500SLM

2. SLM: Standard liters per minute. Standard conditions: 0 ° C and 1 atmosphere

3. In addition, the two-way airflow test can be customized, and the analog output is  correspondingly changed. F(min)—F(max) corresponds to 1-5V output, and 0 flow  corresponds to 3V;

4. Includes temperature drift and linearity error