MEMS Flow sensor in hydrogen fuel cell
The S400 Air flow sensor series (0-500SLPM flow range) is fabricated using a micro-electromechanical system (MEMS) flow sensor chip. It is suitable for the measurement of clean and relatively dry gases for various purposes. It realizes the digitization, intelligence and high safety of the equipment, and has the innovation of traditional industries.
High sensitivity, high reliability, high stability and low cost characteristics can promote the industry to develop energy-saving and intelligent.
Application
Ventilator
oxygen machine
Gas mask and respirator
Sprayer
Continuous positive airway pressure (CPAP) device
Anesthesia delivery
Fuel cell control
spectrometer
Mass flow controller
Environmental climate control
Leak detection
hydrogen fuel cell system
Feature
Wide flow range 0-500SLPM
High precision (1.5% F.S accuracy)
Linear output and temperature compensation
Maintain long-term stability with minimal zero drift
Solid-state sensing core (no surface void or fragile membrane), anti-blocking and pressure shock
Analog output (1 to 5 V) (I2C output is also available)
Fast response time (20ms response time)
1. Customizable range between 10SLM and 500SLM
2. SLM: Standard liters per minute. Standard conditions: 0 ° C and 1 atmosphere
3. In addition, the two-way airflow test can be customized, and the analog output is correspondingly changed. F(min)—F(max) corresponds to 1-5V output, and 0 flow corresponds to 3V;
4. Includes temperature drift and linearity error