Bidirectional Mass air flow sensor
Mass flow sensor featuring bidirectional flow measurement.
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Bidirectional MEMS gas flow sensors & Mass Flow Meters
Wide flow range: 12SLPM, 20SLPM, 35SLPM, 50SLPM, 100SLPM, 150SLPM, 200SLPM, 300SLPM, 500SLPM
I2C or Analog output (1-5V)
Introduction
S4000 series of MEMS air flow sensors (also called a flow meter) are specially designed for the measurement of medical gas flow and process control, which based on the MEMS flow sensor core technology , and applied to the kinds of clean and dry gas flow measurement with achievements of facility digitalization, intelligence and high safety compared to the traditional industry. S4000 series have the property of wide range of flow measurement which satisfy different flow measuring requirements with high sensitivity, high reliability and stability and low cost.
S4000 series promotes to development for more intelligence and energy saving.Application
Medical ventilation,
oxygen machine,
Gas mask and respirator,
Sprayer,
Continuous positive airway pressure (CPAP) device,
Anesthesia delivery,
Leak detection,
Spectrometer,
Mass flow controller,
Environmental climate control,
Fuel cell control
Feature
Wide flow range 12SLPM-950SLPM
High precision (1.5% F.S accuracy)
Linear output and temperature compensation
Maintain long-term stability with minimal zero drift
Solid-state sensing core (no surface void or fragile membrane), anti-blocking and pressure shock
I2C or Analog output (1-5V)
Fast response time (20ms response time)Maximum rating
Working temperature: -25 ° C to 85 ° C
Storage temperature: -40 ° C to 90 ° CHumidity: 0~100%RH*
Impact resistant 100 g
The sensor is resistant to condensationFunction Paremeters
Electrical characteristics
Test conditions: VIN = 12 ± 0.01 VDC, Ta = 25 ° C. Relative humidity: 40% <relative humidity <60%
Maximum operating temperature range -25°C to +85°C
PN
Flow range（1）
Unit（2）
Maximum flow rate（m/s）
S4003BV
-12-12
SLM
0.527
S4004BV
-20-20
SLM
0.877
S4005BV
-35-35
SLM
1.535
S4100BV
-50-50
SLM
2.193
S4101BV
-100-100
SLM
4.387
S4102BV
-150-150
SLM
6.58
S4103BV
-200-200
SLM
8.773
S4104BV
-300-300
SLM
13.16
S4105BV
-500-500
SLM
35.5
Specifications
Minimum
Default
Maximum
Unit
Supply voltage
8
12
24
VDC
Supply current
20
23
30
mA
Analog voltage
output (3)
1
5
VDC
Zero voltage
0.95
1
1.05
VDC
Zero drift
—
—
0.2
%F.S
Resolution (4)
—
0.1
—
%F.S
load
—
100
—
KΩ
Accuracy
—
1.5
2
%F.S
Response time
—
20
30
mSec
Overall material
Silicon carbide, epoxy resin, polyphenylene sulfide, FR4, silicon as a seal
1. Customizable range between 10SLM and 300SLM
2. SLM: Standard liters per minute. Standard conditions: 0°C and 1 atmosphere
3. You can also choose 0-3V output
4. Includes temperature drift and linearity error
5. 5V power supply voltage optionalLinear Output1. The unidirectional airflow mode: (calculation formula)Flow = [(VOUT -1 V) / 4 V] × full scale flowFor example: S4103V has a full-scale flow of 200 SLM. When the output voltage is read at 2.5V,the instantaneous flow rate is [(2.5V-1V) / 4V × 200 SLM] = 75 SLM
2. Two-way airflow mode: (calculation formula)Forward flow = [(VOUT -3 V)/2 V] × full scale flowReverse flow = [(3 V- VOUT)/2 V] × full scale flowShell SizeNote 1: The connector can be matched with a connecting line according to customer requirements.
