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MEMS H2 hydrogen sensor

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    H2 sensor is a miniature metal oxide semiconductor gas sensor based on MEMS micro-hot disk technology, which is used to detect hydrogen in the air.

    The production of the sensor combines MEMS silicon substrate technology, thin film technology, thick film technology, and ceramic packaging technology. The patented nano skeleton gas sensitive layer is deposited on the top of the micro-hot plate and interdigital electrode, thus producing a conductivity that depends on the hydrogen concentration.

     

    Feature

    Highly sensitive to hydrogen (0.1~1000ppm)

    Quick response (~10 Sec.)

    Very low power consumption (34~36 mW)

    Ultra-small size (3.8mm ×  3.8mm  ×  1.5mm

    Long life (~10 years)

    Long-term stability

    Reflow soldering is possible

     

    Application

    Hydrogen leakage detection

    Lithium battery thermal runaway monitoring

    Internet of Things, wearable devices

    Smart home

     

    Performance 

    Parameter

    Symbol

    Specification

    Unit

    Air sensitive resistance

    R0

    30~1000

     

     

    Detection range

    FS

    0.1~1000

    ppm

    Sensitivity

    S10

    >1.5

    -

    Response time

    TS

    < 20

    Sec.

    Recovery time

    TR

    < 60

    Sec.

     

     

    Bottom dimension drawing (unit: mm)

     

    Pin connection

    Pin    function

    1      Heating electrode 1

    2      NA

    3      Sensitive electrode 1

    4      NA

    5      Heating electrode 2

    6      NA

    7      Sensitive electrode 2

    8      NA

     

     

    Heating circuit

    Parameter

    Symbol

    Specification

    Unit

    Heating resistance

    RH

    180~220

    Ω

    Heating voltage

    VH

    2.6~2.8

    V

    Heating power

    PH

    34~36

    mW

     

    Sensitive circuit

    Parameter

    Symbol

    Specification

    Unit

    Sensitive voltage

    VS

    ≤ 5.5

    V

    Sensitive power

    PS  

    1

    mW