MEMS H2 hydrogen sensor
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H2 sensor is a miniature metal oxide semiconductor gas sensor based on MEMS micro-hot disk technology, which is used to detect hydrogen in the air.
The production of the sensor combines MEMS silicon substrate technology, thin film technology, thick film technology, and ceramic packaging technology. The patented nano skeleton gas sensitive layer is deposited on the top of the micro-hot plate and interdigital electrode, thus producing a conductivity that depends on the hydrogen concentration.
Feature
Highly sensitive to hydrogen (0.1~1000ppm)
Quick response (~10 Sec.)
Very low power consumption (34~36 mW)
Ultra-small size (3.8mm × 3.8mm × 1.5mm)
Long life (~10 years)
Long-term stability
Reflow soldering is possible
Application
Hydrogen leakage detection
Lithium battery thermal runaway monitoring
Internet of Things, wearable devices
Smart home
Performance
Parameter
Symbol
Specification
Unit
Air sensitive resistance
R0
30~1000
kΩ
Detection range
FS
0.1~1000
ppm
Sensitivity
S10
>1.5
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Response time
TS
< 20
Sec.
Recovery time
TR
< 60
Sec.
Bottom dimension drawing (unit: mm)
Pin connection
Pin function
1 Heating electrode 1
2 NA
3 Sensitive electrode 1
4 NA
5 Heating electrode 2
6 NA
7 Sensitive electrode 2
8 NA
Heating circuit
Parameter
Symbol
Specification
Unit
Heating resistance
RH
180~220
Ω
Heating voltage
VH
2.6~2.8
V
Heating power
PH
34~36
mW
Sensitive circuit
Parameter
Symbol
Specification
Unit
Sensitive voltage
VS
≤ 5.5
V
Sensitive power
PS
≤ 1
mW